Engineering Science and Materials Commons^™

Structure Morphology And Optical Properties Of Nanocrystalline Ga2o3 Thin Films, Sampath Kumar Samala

Open Access Theses & Dissertations

Gallium Oxide thin films were produced by sputter deposition by varying the substrate temperature (T_s) in a wide range (T_s=25-800 oC) and under variable deposition time. The structural characteristics and optical properties of Ga₂O₃ films were evaluated using X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive X-ray spectrometry (EDS), Rutherford backscattering spectrometry (RBS) and spectrophotometric measurements. The effect of growth temperature is significant on the chemistry, crystal structure and morphology of Ga₂O₃ films. XRD and SEM analyses indicate that the Ga₂O₃ films grown at lower temperatures were …