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Engineering Science and Materials Commons

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Full-Text Articles in Engineering Science and Materials

Influence Of Flow Rate, Nozzle Speed, Pitch And The Number Of Passes On The Thickness Of S1805 Photoresist In Suss Microtec As8 Spray Coater, Rohan Sanghvi, Gyuseok Kim Oct 2019

Influence Of Flow Rate, Nozzle Speed, Pitch And The Number Of Passes On The Thickness Of S1805 Photoresist In Suss Microtec As8 Spray Coater, Rohan Sanghvi, Gyuseok Kim

Tool Data

S1805 positive photoresist has been deposited on single crystalline Si wafers using a Suss MicroTec Alta Spray. The influence of flow rate, nozzle speed, pitch and number of passes on the thickness of the photoresist was studied. Results show that the thickness of S1805 is linearly proportional to the flow rate and number of passes, and inversely proportional to the nozzle speed and pitch.


Self-Aligned Double Pattern, No1, Yinong Cao May 2016

Self-Aligned Double Pattern, No1, Yinong Cao

Protocols and Reports

No abstract provided.


Patterning Of Alloy Precipitation Through External Pressure, Jack A. Franklin Dec 2010

Patterning Of Alloy Precipitation Through External Pressure, Jack A. Franklin

Publicly Accessible Penn Dissertations

Due to the nature of their microstructure, alloyed components have the benefit of meeting specific design goals across a wide range of electrical, thermal, and mechanical properties. In general by selecting the correct alloy system and applying a proper heat treatment it is possible to create a metallic sample whose properties achieve a unique set of design requirements. This dissertation presents an innovative processing technique intended to control both the location of formation and the growth rates of precipitates within metallic alloys in order to create multiple patterned areas of unique microstructure within a single sample. Specific experimental results for ...