Engineering Science and Materials Commons^™

Use Of A Single Multiplexed Cmos Oscillator As Direct Frequency Read-Out For An Array Of Eight Aln Contour-Mode Nems Resonant Sensors, Matteo Rinaldi, Chiara Zuniga, Brandon Duick, Gianluca Piazza

Matteo Rinaldi

This paper reports on the first demonstration of a single multiplexed CMOS oscillator circuit employed as direct frequency readout for an array of 8 nanoscaled aluminum nitride Contour-Mode Resonant Sensors (CMR-S). In this first prototype 8 thin-film (250 nm) AlN CMR-S operating at 186 MHz were fabricated on the same chip and simultaneously wire-bonded to a Pierce-like oscillator circuit (fabricated in the ON Semiconductor 0.5 µm CMOS process) by means of 8 CMOS transmission gates addressed via a 3 bit on-chip decoder. The 8 CMR-S were simultaneously exposed to different concentrations of methanol (0.1–1% of the saturated vapor pressure) and …