Engineering Science and Materials Commons^™

Multifunctional Properties Of Gan Nws Applied To Nanometrology, Nanophotonics, And Scanning Probe Microscopy/Lithography, Mahmoud Behzadirad

Optical Science and Engineering ETDs

GaN nanowires are promising for optical and optoelectronic applications because of their waveguiding properties and large optical bandgap. Recent researches have shown superior mechanical properties of GaN nanowires which promises their use in new research areas e.g. nanometrology. In this work, we develop a scalable two-step top-down approach using interferometric lithography as well a bottom-up growth of NWs using MOCVD, to manufacture highly-ordered arrays of nanowires with atomic surface roughness and desired aspect-ratios to be used in nanophotonics and atomic precision metrology and lithography. Using this method, uniform nanowire arrays were achieved over large-areas (~1 mm²) with aspect-ratio …