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Computational Analysis Of Input-Shaping Control Of Microelectromechanical Mirrors, Thomas Starling
Computational Analysis Of Input-Shaping Control Of Microelectromechanical Mirrors, Thomas Starling
All Theses
Advances in micromachining technology have enabled the design and development of high performance microelectromechanical systems (MEMS). There is a pressing need for control techniques that can be used to improve the dynamic behavior of MEMS such as the response speed and precision. In MEMS applications, open-loop control is attractive as it computes a priori the required system input to achieve desired dynamic behavior without using feedback, thus eliminating the problems associated with closed-loop MEMS control. While the input-shaping control is attractive due to its simplicity, the effectiveness of this control approach depends on the accuracy of the model that is …
Nonlinear Vibration And Frequency Response Analysis Of Nanomechanical Cantilever Beams, Seyed Nima Mahmoodi
Nonlinear Vibration And Frequency Response Analysis Of Nanomechanical Cantilever Beams, Seyed Nima Mahmoodi
All Dissertations
Microcantilevers are one the most commonly utilized microelectromechanical systems in a variant of the ultra-precise scanning and characterization application. Of particular interest, the problem of vibrations of microcantilevers has recently received considerable attention due to its application in several nanotechnological instruments such as atomic force microscopy, nanomechanical cantilever sensors and friction force microscopy. For applications such as these, the problem of coupled flexural-torsional nonlinear vibrations of a piezoelectrically-actuated microcantilever beam is considered in this dissertation. The actuation and sensing are both facilitated through bonding a piezoelectric layer (here, ZnO) on the microcantilever surface. The beam is considered to have simultaneous …