Engineering Science and Materials Commons^™

Fabrication And Characterization Of Nanocrystalline Yttrium Oxide Thin Films For Electronic Device Applications, Mudavakkat Vikas Haridas

Open Access Theses & Dissertations

This thesis presents the optimization of growth conditions for fabricating nanocrystalline Yttrium Oxide (Y2O3) thin films on silicon and optical grade, high quality quartz substrates in order to study its structural, optical and electrical properties for electronic device applications.

Commercially Y2O3 has proven to be difficult to fabricate at high quality due to its high temperature growth requirements and the need to alter established fabrication methods for electronic devices. A high temperature requirement for high quality poses a problem for research and analysis. This calls upon for an optimization of the growth conditions to facilitate fabrication of thin films for …