Electrical and Computer Engineering Commons^™

Rf And Structural Characterization Of Srf Thin Films, A.M. Valente-Feliciano, H.L. Phillips, C.E. Reece, J. Spradlin, X. Zhao, D. Gu, H. Baumgart, D. Beringer, R.A. Lukaszew, B. Xiao, K. Seo

Electrical & Computer Engineering Faculty Publications

In the past years, energetic vacuum deposition methods have been developed in different laboratories to improve Nb/Cu technology for superconducting cavities. JLab is pursuing energetic condensation deposition via Electron Cyclotron Resonance. As part of this study, the influence of the deposition energy on the material and RF properties of the Nb thin film is investigated. The film surface and structure analyses are conducted with various techniques like X-ray diffraction, Transmission Electron Microscopy, Auger Electron Spectroscopy and RHEED. The microwave properties of the films are characterized on 50 mm disk samples with a 7.5 GHz surface impedance characterization system. This paper …