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Computer Engineering Commons

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Electrical and Computer Engineering Faculty Research and Publications

MEMS

2013

Articles 1 - 2 of 2

Full-Text Articles in Computer Engineering

Using Micro-Raman Spectroscopy To Assess Mems Si/Sio2 Membranes Exhibiting Negative Spring Constant Behavior, Lavern A. Starman, Ronald A. Coutu Jr. Apr 2013

Using Micro-Raman Spectroscopy To Assess Mems Si/Sio2 Membranes Exhibiting Negative Spring Constant Behavior, Lavern A. Starman, Ronald A. Coutu Jr.

Electrical and Computer Engineering Faculty Research and Publications

We introduce a novel micro-mechanical structure that exhibits two regions of stable linear positive and negative stiffness. Springs, cantilevers, beams and any other geometry that display an increasing return force that is proportional to the displacement can be considered to have a “Hookean” positive spring constant, or stiffness. Less well known is the opposite characteristic of a reducing return force for a given deflection, or negative stiffness. Unfortunately many simple negative stiffness structures exhibit unstable buckling and require additional moving components during deflection to avoid deforming out of its useful shape. In Micro-Electro-Mechanical Systems (MEMS) devices, buckling caused by stress …


Effect Of Hydrodynamic Force On Microcantilever Vibrations: Applications To Liquid-Phase Chemical Sensing, I. Dufour, E. Lemaire, B. Caillard, H. Debeda, C. Lucat, Stephen M. Heinrich, Fabien Josse, O. Brand Jan 2013

Effect Of Hydrodynamic Force On Microcantilever Vibrations: Applications To Liquid-Phase Chemical Sensing, I. Dufour, E. Lemaire, B. Caillard, H. Debeda, C. Lucat, Stephen M. Heinrich, Fabien Josse, O. Brand

Electrical and Computer Engineering Faculty Research and Publications

At the microscale, cantilever vibrations depend not only on the microstructure’s properties and geometry but also on the properties of the surrounding medium. In fact, when a microcantilever vibrates in a fluid, the fluid offers resistance to the motion of the beam. The study of the influence of the hydrodynamic force on the microcantilever’s vibrational spectrum can be used to either (1) optimize the use of microcantilevers for chemical detection in liquid media or (2) extract the mechanical properties of the fluid. The classical method for application (1) in gas is to operate the microcantilever in the dynamic transverse bending …