Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 3 of 3
Full-Text Articles in Computer Engineering
Stress Monitoring Of Post-Processed Mems Silicon Microbridge Structures Using Raman Spectroscopy, Lavern A. Starman, Ronald A. Coutu Jr.
Stress Monitoring Of Post-Processed Mems Silicon Microbridge Structures Using Raman Spectroscopy, Lavern A. Starman, Ronald A. Coutu Jr.
Electrical and Computer Engineering Faculty Research and Publications
Inherent residual stresses during material deposition can have profound effects on the functionality and reliability of fabricated Micro-Electro-Mechanical Systems (MEMS) devices. Residual stress often causes device failure due to curling, buckling, or fracture. Typically, the material properties of thin films used in surface micromachining are not well controlled during deposition. The residual stress; for example, tends to vary significantly for different deposition methods. Currently, few nondestructive techniques are available to measure residual stress in MEMS devices prior to the final release etch. In this research, micro-Raman spectroscopy is used to measure the residual stresses in polysilicon MEMS microbridge devices. This …
Srrs Embedded With Mems Cantilevers To Enable Electrostatic Tuning Of The Resonant Frequency, E. A. Moore, Derrick Langley, Matthew E. Jussaume, L. A. Rederis, C. A. Lundell, Ronald A. Coutu Jr., Peter J. Collins, Lavern A. Starman
Srrs Embedded With Mems Cantilevers To Enable Electrostatic Tuning Of The Resonant Frequency, E. A. Moore, Derrick Langley, Matthew E. Jussaume, L. A. Rederis, C. A. Lundell, Ronald A. Coutu Jr., Peter J. Collins, Lavern A. Starman
Electrical and Computer Engineering Faculty Research and Publications
A microelectromechanical systems (MEMS) cantilever array was monolithically fabricated in the gap region of a split ring resonator (SRR) to enable electrostatic tuning of the resonant frequency. The design consisted of two concentric SRRs each with a set of cantilevers extending across the split region. The cantilever array consisted of five beams that varied in length from 300 to 400 μm, with each beam adding about 2 pF to the capacitance as it actuated. The entire structure was fabricated monolithically to reduce its size and minimize losses from externally wire bonded components. The beams actuate one at a time, longest …
A Mems Photoacoustic Detector Of Terahertz Radiation For Chemical Sensing, Nathan Glauvitz, S. Blazevic, Ronald A. Coutu Jr., Michael Kistler, Ivan R. Medvedev, Douglas T. Petkie
A Mems Photoacoustic Detector Of Terahertz Radiation For Chemical Sensing, Nathan Glauvitz, S. Blazevic, Ronald A. Coutu Jr., Michael Kistler, Ivan R. Medvedev, Douglas T. Petkie
Electrical and Computer Engineering Faculty Research and Publications
A piezoelectric Microelectromechanical system (MEMS) cantilever pressure sensor was designed, modeled, fabricated, and tested for sensing the photoacoustic response of gases to terahertz (THz) radiation. The sensing layers were comprised of three thin films; a lead zirconate titanate (PZT) piezoelectric layer sandwiched between two metal contact layers. The sensor materials were deposited on the silicon device layer of a silicon-on-insulator (SOI) wafer, which formed the physical structure of the cantilever. To release the cantilever, a hole was etched through the backside of the wafer and the buried oxide was removed with hydrofluoric acid. Devices were then tested in a custom …