Computer Engineering Commons^™

A Comparison Of Micro-Switch Analytic, Finite Element, And Experimental Results, Ronald A. Coutu Jr., P. E. Kladitis, Lavern A. Starman, J. R. Reid

Electrical and Computer Engineering Faculty Research and Publications

Electrostatically actuated, metal contact, micro-switches depend on having adequate contact force to achieve desired, low contact resistance. In this study, higher contact forces resulted from overdriving cantilever beam style switches, after pull-in or initial contact, until the beam collapsed onto the drive or actuation electrode. The difference between initial contact and beam collapse was defined as the useful contact force range. Micro-switch pull-in voltage, collapse voltage, and contact force predictions, modeled analytically and with the CoventorWare finite element software package, were compared to experimental results. Contact resistance was modeled analytically using Maxwellian spreading resistance theory. Contact resistance and contact …