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Full-Text Articles in Computer Engineering
Modeling Of Quad-Station Module Cluster Tools Using Petri Nets, Aung Nay
Modeling Of Quad-Station Module Cluster Tools Using Petri Nets, Aung Nay
Theses
The semiconductor industry is highly competitive, and with the recent chip shortage, the throughput of wafers has become more important than ever. One of the tools that the industry has deployed is to use of quad-station modules instead of the traditional single-station modules that allow for higher throughput and better wafer consistency by processing multiple wafers at the same time and distributing work. The industry trend is to use multiple transfer chamber robots to stack the quad-station modules in a series, particularly for etch products. In this work, the quad-station cluster tool wafer movement is modeled by using Petri net …
Design And Implementation Of Photovoltaic Energy Harvesting Automaton, Iskandar Askarov
Design And Implementation Of Photovoltaic Energy Harvesting Automaton, Iskandar Askarov
Theses
Global domestic electricity consumption has been rapidly increasing in the past three decades. In fact, from 1990 to 2020, consumption has more than doubled from 10,120 TWh to 23,177 TWh [1]. Moreover, consumers have been turning more towards clean, renewable energy sources such as Photovoltaic. According to International Energy Agency, global Solar power generation alone in 2019 has reached almost 3% [4] of the electricity supply. Even though the efficiency of photovoltaic panels has been growing, presently, the highest efficiency solar panels available to an average consumer range only from 20%-22% [14]. Many research papers have been published to increase …