Computer Engineering Commons^™

Nanomechanical Resonators: Toward Atomic Scale, Bo Xu, Pengcheng Zhang, Jiankai Zhu, Zuheng Liu, Alexander Eichler, Xu-Qian Zheng, Jaesung Lee, Aneesh Dash, Swapnil More, Song Wu, Yanan Yanan, Hao Jia, Akshay Naik, Adrian Bachtold, Rui Yang, Philip X.-L. Feng, Zenghui Wang

Department of Electrical and Computer Engineering: Faculty Publications

The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to new grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes, and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained efforts have been devoted to creating mechanical devices toward the ultimate limit of miniaturization— genuinely down …