Chemical Engineering Commons^™

Piezoelectric Sensors / Actuators For Use In Refractory Environments, Hendrik J. Viljoen, Barend R. Jooste

Papers in Reaction Kinetics

pierozlectric properties over a large temperature range of from room temperature to approximately 1360 degrees centigrade. The piezarlecttic system is sequentially comprised of a first electrically conductive layer, a layer of (Ta,O,) in other than a rnonoclinic phase, ipreferably onhorhombic demonstrating small x-ray crystalopraphic and peaksi. and a second slecttically conductive layer A preferred method of fabrication involves sputter deposition of both said layer of (Ta,O) md said second electrically conductive layer.