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Mems Transducer For Hearing Aid Device, Houwen Tang
Mems Transducer For Hearing Aid Device, Houwen Tang
Electronic Theses and Dissertations
A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is