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Biomedical Engineering and Bioengineering Commons

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Electrical and Computer Engineering

Theses/Dissertations

Microelectromechanical systems

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Full-Text Articles in Biomedical Engineering and Bioengineering

Mems Transducer For Hearing Aid Device, Houwen Tang Jan 2008

Mems Transducer For Hearing Aid Device, Houwen Tang

Electronic Theses and Dissertations

A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is


Biological Cell Identification By Integrating Micro-Fluidics, Electrical Impedance Spectroscopy And Stochastic Estimation, Karl R. Schwenn Mar 2007

Biological Cell Identification By Integrating Micro-Fluidics, Electrical Impedance Spectroscopy And Stochastic Estimation, Karl R. Schwenn

Theses and Dissertations

The integration of micro-fluidics, electrical impedance spectroscopy and stochastic estimation will lead to a device with enhanced detection capabilities. The goal of this thesis was to build a micro-fluidic electrical impedance measurement device that can be used in combination with a stochastic estimator to accurately identify living cells. A microdevice capable of making impedance measurements on individual living cells was designed and built using a series of standard microelectronic fabrication techniques. A microchannel was patterned in SU-8 photoresist between two gold microelectrodes on a two inch Pyrex 7740 wafer. The design process, the fabrication techniques for the microchannel, the fluid …