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Full-Text Articles in Aerospace Engineering
Design And Fem Modelling Of Mems Capacitive Accelerometer And Gyroscope For Quadcopter/Uav Applications, Shaikha Rashid Alnaqbi
Design And Fem Modelling Of Mems Capacitive Accelerometer And Gyroscope For Quadcopter/Uav Applications, Shaikha Rashid Alnaqbi
Theses
This study presents the design, simulation, and analysis of Micro Electromechanical Systems (MEMS) sensors, constituting the principal components of MEMS-based Inertial Measurement Units (IMUs). The main objective of the study is to design, simulate and analyze 3-axis capacitive accelerometer and 3-axis gyroscope. The MEMS-based capacitive accelerometers and gyroscope are analyzed using Ansys Workbench. Modal, Static Structural and harmonic analysis are used to obtain resonant frequencies, deformation/stress and profile of amplitude over a wide range of frequencies. Mechanical sensitivity analysis of the designed accelerometer and gyroscope is performed using the Finite Element Method (FEM). Analytical Equations are developed to calculate mechanical …