Engineering Commons^™

Numerical And Experimental Studies Of Atomic Layer Deposition For Sustainability Improvement, Dongqing Pan

Theses and Dissertations

Atomic layer deposition (ALD) is an approved nano-scale thin films fabrication technique with remarkable uniformity and conformity in surface geometry. This dissertation presents numerical and experimental studies to investigate the transient physical and chemical ALD process in order to improve its sustainability performance in terms of throughput, wastes and emissions.

To be specific, in this dissertation, the transient process of ALD is studied extensively through both numerical and experimental approaches to find the influential factors on the two main critical sustainability issues: low throughput and negative environmental impacts. Different numerical schemes are developed and studied for ALD process simulations. In …

Sustainability: Reusing Data Center Waste Heat, John Boushra, Kyle Duncan, Aleksandr Kogan, Giang Pham

Capstone Design Expo Posters

Data Centers are facilities used to house a large number of computer systems and their associated components, such as telecommunications and data storage systems. Nowadays many organizations depend on the reliable operation of their data centers for their day to day business operations. Data centers are designed with redundant and backup power supplies, redundant data communications connections, robust cybersecurity protocols and very strict environmental controls. The many computer systems held in a typical data center generate large heat loads that need to be continuously removed with high grade air conditioning systems. Anthem currently owns a large corporate data center in …