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Chemical Bonding In Hard And Elastic Amorphous Carbon-Nitride Films, W. Jason Gammon
Chemical Bonding In Hard And Elastic Amorphous Carbon-Nitride Films, W. Jason Gammon
Dissertations, Theses, and Masters Projects
In this study, the chemical bonding in hard and elastic amorphous carbon nitride (a-CNx) films is investigated with x-ray photoelectron spectroscopy (XPS) and 15N, 13C, and 1H nuclear magnetic resonance (NMR) spectroscopy. The films were deposited by DC Magnetron sputtering in a pure nitrogen discharge on Si(001) substrates at 300--400??C. Nanoindentation measurements reveal an elastic modulus of ∼50 GPa and a hardness of ∼5 GPa, thus confirming our films are highly elastic but resist plastic deformation.;Our 13C NMR study demonstrates the absence of sp 3-bonded carbon in this material. Collectively, our N(1s) XPS, 13C NMR, and 15N NMR data suggest …