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Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps
Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps
Theses and Dissertations
Many different micro-electro-mechanical switches were designed in the Multi-User MEMS processes (MUMPs) and deep x-ray lithography and electroforming (LIGA) processes. The switches were composed of actuators that operated based upon either electrostatic forces or thermal forces. A thermally activated beam flexure actuator that operated based upon differential heating was used extensively. This actuator, which was fabricated in the MUMPs process, was able to deflect up to 12 microns with a total input power of less than 25 mW. The thermal resistance, which was needed to model this actuator, was determined from a material constant, 1.9 ± 0.08 m1.5-°C-W …
Design, Fabrication, Modeling, And Testing Of Surface-Micromachined Micromirror Devices, M. Adrian Michalicek
Design, Fabrication, Modeling, And Testing Of Surface-Micromachined Micromirror Devices, M. Adrian Michalicek
Theses and Dissertations
The Flexure-Beam Micromirror Device (FBMD) is a phase-only piston style spatial light modulator demonstrating properties which can be used for phase adaptive- corrective optics. This thesis presents a complete study of new designs of FBMDs and other micromirror devices, from original design considerations through final device testing and verification of ideal and advanced models. The models relate the electrical and mechanical properties of the device by equating the electrostatic force of a parallel- plate capacitor with the counteracting spring force of the device's support flexures. For the advanced model of the Flexure-Beam micromirror device, the capacitor solution is derived via …