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Theses/Dissertations

Air Force Institute of Technology

2016

Electronic Devices and Semiconductor Manufacturing

Lithography

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Full-Text Articles in Engineering

Improvements To Micro-Contact Performance And Reliability, Tod V. Laurvick Dec 2016

Improvements To Micro-Contact Performance And Reliability, Tod V. Laurvick

Theses and Dissertations

Microelectromechanical Systems (MEMS) based devices, and specifically microswitches, continue to offer many advantages over competing technologies. To realize the benefits of micro-switches, improvements must be made to address performance and reliability shortfalls which have long been an issue with this application. To improve the performance of these devices, the micro-contacts used in this technology must be understood to allow for design improvements, and offer a means for testing to validate this technology and determine when such improvements are ready for operational environments. To build devices which are more robust and capable of continued operation after billions of cycles requires that …