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Fabrication Of Polysilicon Micro Valve Array, Jermaine White

Journal of the Microelectronic Engineering Conference

Valves are an essential part of pumping systems, which are used in a wide variety of applications including medical, automotive, gas sampling, and gas analysis. The objective of this investigation is to design and fabricate microvalve arrays. The valve consists of a polysilicon flap suspended over a through hole in the silicon. It is intended to allow airflow in one direction and inhibit airflow in the reverse direction. The design requires only three mask levels, two on the front of the wafer and one on the backside. The front side masks are level: 1 Anchor and level 2: Flap. The …