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Method Of Manufacturing A Semiconductor Heteroepitaxy Structure, Zhi David Chen
Method Of Manufacturing A Semiconductor Heteroepitaxy Structure, Zhi David Chen
Electrical and Computer Engineering Faculty Patents
A method of manufacturing a semiconductor structure includes the steps of depositing a layer of semiconductor oxide on a base semiconductor layer, scavenging oxygen from the layer of semiconductor oxide and recrystallizing the oxygen scavenged layer of semiconductor oxide as a semiconductor heteroepitaxy layer.