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Full-Text Articles in Engineering
Manufacturing Of Single Solid Oxide Fuel Cells, Jonathan Torres-Caceres
Manufacturing Of Single Solid Oxide Fuel Cells, Jonathan Torres-Caceres
Electronic Theses and Dissertations
Solid oxide fuel cells (SOFCs) are devices that convert chemical energy into electrical energy and have the potential to become a reliable renewable energy source that can be used on a large scale. SOFCs have 3 main components; the electrolyte, the anode, and the cathode. Typically, SOFCs work by reducing oxygen at the cathode into O2- ions which are then transported via the electrolyte to the anode to combine with a fuel such as hydrogen to produce electricity. Research into better materials and manufacturing methods is necessary to reduce costs and improve efficiency to make the technology commercially viable. The …
Slurry Chemistry Effects On Copper Chemical Mechanical Planarization, Ying Luo
Slurry Chemistry Effects On Copper Chemical Mechanical Planarization, Ying Luo
Electronic Theses and Dissertations
Chemical-mechanical Planarization (CMP) has emerged as one of the fastest-growing processes in the semiconductor manufacturing industry, and it is expected to show equally explosive growth in the future (Braun, 2001). The development of CMP has been fueled by the introduction of copper interconnects in microelectronic devices. Other novel applications of CMP include the fabrications of microelectromechanical systems (MEMS), advanced displays, three dimensional systems, and so on (Evans, 2002). CMP is expected to play a key role in the next-generation micro- and nanofabrication technologies (Singh, et al., 2002). Despite the rapid increase in CMP applications, the fundamental understanding of the CMP …