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Multifrequency Pierce Oscillators Based On Piezoelectric Aln Contour-Mode Mems Technology, Chengjie Zuo, Nipun Sinha, Jan Van Der Spiegel, Gianluca Piazza

Chengjie Zuo

This paper reports on the first demonstration of multifrequency (176-, 222-, 307-, and 482-MHz) oscillators based on the piezoelectric AlN contour-mode microelectromechanical systems technology. All the oscillators show phase noise values between −88 and −68 dBc/Hz at 1-kHz offset frequency from the carriers and phase noise floor values as low as −160 dBc/Hz at 1-MHz offset. The same Pierce circuit design is employed to sustain oscillations at the four different frequencies; on the other hand, the oscillator core consumes 10 mW. The AlN resonators are currently wire bonded to the integrated circuit realized in the AMIS 0.5-μm 5-V complimentary metal-oxide-semiconductor …