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Full-Text Articles in Engineering

Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam Dec 2023

Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam

Electronic Theses and Dissertations

Advancements in microscale actuating technologies has substantially expanded the possibilities of interacting with the surrounding environment. Microstructures that deflect in response to mechanical forces are one of the largest application areas of microelectromechanical systems (MEMS). MEMS devices, functioning as sensors, actuators, and support structures, find applications in inertial sensors, pressure sensors, chemical sensors, and robotics, among others. Driven by the critical role of catalytic membrane reactors, this dissertation aims to evaluate enzyme activity on polymeric membranes and explore how fabrication methods from the field of Electrical and Computer Engineering (ECE) can incorporate sensing and actuation into these porous surfaces. Toward …


Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang May 2023

Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang

Electronic Theses and Dissertations

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large …


Surface-Functionalized Chemiresistive Films That Exploit H-Bonding, Cation-Pi, And Metal-Halide Interactions., Prasadanie Karunarathna Adhihetty May 2022

Surface-Functionalized Chemiresistive Films That Exploit H-Bonding, Cation-Pi, And Metal-Halide Interactions., Prasadanie Karunarathna Adhihetty

Electronic Theses and Dissertations

The development of gas sensors for detection of volatile organic compounds (VOCs) has been of interest in the sensing field for decades. To date, the use of metal nanoparticle-based chemiresistors for trace VOC detection, particularly gold nanoparticle-based sensors, is of great interest due to their high chemical stability, ease of synthesis, unique optical properties, large surface to volume ratio, and high level of conductivity. Much effort has been devoted towards gold monolayer protected clusters (Au MPCs) as chemiresistors to detect harmful VOCs. The present thesis documents the results of our efforts to exploit the advantages of functionalized Au MPCs chemiresistors …


Microrobots For Wafer Scale Microfactory: Design Fabrication Integration And Control., Ruoshi Zhang May 2020

Microrobots For Wafer Scale Microfactory: Design Fabrication Integration And Control., Ruoshi Zhang

Electronic Theses and Dissertations

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling …


Solarpede: An Untethered Micro Robot Powered By Light., Jordan Fredrick Klotz Aug 2019

Solarpede: An Untethered Micro Robot Powered By Light., Jordan Fredrick Klotz

Electronic Theses and Dissertations

Micro-Robotics looks to implement robotics principles at a small scale and has gained popularity in recent decades as a gateway to new research areas such as micro-factory applications. The SolarPede is a second-generation, cm-scale micro-crawler designed for such micro factory applications which is equipped with a legged locomotion system and an electronic backpack. The SolarPede is an evolution of its predecessors and features power and signal conditioning capabilities, gait pattern generation, and Bluetooth connectivity. The components which make up SolarPede have been full validated and tested, and its systems have been realized in the form of a body made from …


Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra Dec 2018

Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra

Electronic Theses and Dissertations

We explored UV, X-ray and proton radiation damage mechanisms in MEMS resonators. T-shaped MEMS resonators of different dimensions were used to investigate the effect of radiation. Radiation damage is observed in the form of resistance and resonance frequency shift of the device. The resistance change indicates a change in free carrier concentration and mobility, while the resonance frequency change indicates a change in mass and/or elastic constant. For 255nm UV radiation, we observed a persistent photoconductivity that lasts for about 60 hours after radiation is turned off. The resonance frequency also decreases 40-90 ppm during irradiation and slowly recovers at …


Applications Of Polarized Metallic Nanostructures., Jasmin Beharic Aug 2017

Applications Of Polarized Metallic Nanostructures., Jasmin Beharic

Electronic Theses and Dissertations

Gold nanostructures exhibit technologically useful properties when they are polarized in an electric field. In two projects we explore instances where the polarized metal can be used in real world applications. The first project involves gold nanoparticles (GNP) for use in light actuated microelectromechanical systems (MEMS) applications. Although the GNPs were originally designed for volumetric heating in biomedical applications, we treat them as a thin film coating, opening the door for these particles to be used in MEMS applications. This work characterizes the thermal properties of gold nanoparticles on surfaces for spatially-targeted thermal actuation in MEMS systems. The second project …


Piezoelectric Bistable Buckled Beam Energy Harvester., Brian Edward Allgeier Aug 2017

Piezoelectric Bistable Buckled Beam Energy Harvester., Brian Edward Allgeier

Electronic Theses and Dissertations

A novel energy harvesting device design is presented to be created via microfabrication techniques. Such devices have countless applications for powering low-current electrical devices, especially wireless sensors or transmitters. This micro-electromechanical system (MEMS) design utilizes the piezoelectric response of a bistable buckled beam to gather electrical energy via ambient vibrations. While many traditional piezoelectric energy harvesters (PEH) consist of simple cantilever beam geometries, this nonlinear design utilizes inertial effects of torsional lever arms to actuate a central buckled beam to snap between its two stable states; such an abrupt strain on the piezoelectric beam potentially produces a significantly increased electrical …


Strategies And Techniques For Fabricating Mems Bistable Thermal Actuators., Dilan Ratnayake Dec 2016

Strategies And Techniques For Fabricating Mems Bistable Thermal Actuators., Dilan Ratnayake

Electronic Theses and Dissertations

Bistable elements are beginning to appear in the field of MEMS as they allow engineers to design sensors and actuators which require no electrical power and possess mechanical memory. This research focuses on the development of novel strategies and techniques for fabricating MEMS bistable structures to serve as no electrical power thermal actuators. Two parallel strategies were explored for the design and fabrication of the critical bistable element. Both strategies involved an extensive material study on candidate thin film materials to determine their temperature coefficient of expansion and as-deposited internal stress properties. Materials investigated included titanium tungsten, Invar, silicon nitride …


Design And Development Of A Mems-Based Capacitive Bending Strain Sensor And A Biocompatible Housing For A Telemetric Strain Monitoring System., Julia Marie Weyer Aebersold 1969- May 2005

Design And Development Of A Mems-Based Capacitive Bending Strain Sensor And A Biocompatible Housing For A Telemetric Strain Monitoring System., Julia Marie Weyer Aebersold 1969-

Electronic Theses and Dissertations

Lumbar arthrodesis or spinal fusion is usually performed to relieve back pain and regain functionality from ruptured discs, disc degenerative disease, trauma and scoliosis. Metal rods are often fixed to the spine with screws or hooks, while fusion develops on the affected vertebrae. Fusion is determined by visual examination of radiographic images (X-ray), computed tomography (CT) scans or magnetic resonance imaging (MRI), yet these inspection procedures are subjective methods of review. They do not objectively confirm the presence of spinal fusion, which can lead to exploratory surgery to determine if fusion has occurred. Therefore, a need has arisen to develop …