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Vibrating Flexoelectric Micro-Beams As Angular Rate Sensors, Yilin Qu, Feng Jin, Jiashi S. Yang
Vibrating Flexoelectric Micro-Beams As Angular Rate Sensors, Yilin Qu, Feng Jin, Jiashi S. Yang
Department of Mechanical and Materials Engineering: Faculty Publications
We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.
Vibrating Flexoelectric Micro-Beams As Angular Rate Sensors, Yilin Qu, Feng Jin, Jiashi S. Yang
Vibrating Flexoelectric Micro-Beams As Angular Rate Sensors, Yilin Qu, Feng Jin, Jiashi S. Yang
Department of Mechanical and Materials Engineering: Faculty Publications
We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.
Evaluating The Effects Of Granulated Rubber And Glass Fibers In Polymer Concrete As A Structural Material For Wafer Grinding Machines, Kevin Gabriel Kuehn, Philip Randall Streeter
Evaluating The Effects Of Granulated Rubber And Glass Fibers In Polymer Concrete As A Structural Material For Wafer Grinding Machines, Kevin Gabriel Kuehn, Philip Randall Streeter
Materials Engineering
Polymer concrete is a composite material used to replace cast iron and steel in wafer grinding machines for vibration damping. During the grinding and lapping processes of manufacturing silicon wafers, excessive vibrations may cause subsurface damage which requires additional polishing and reduces yield. Nine compositions containing various levels of granulated rubber and glass fibers were manufactured. CRM WRF-10 granulated rubber was examined at 0%, 5%, and 10% and Corning Cem-Fil glass fibers were added at 0%, 0.5%, and 1% by weight. Smooth-On EpoxAcast 690 epoxy resin was held constant at 16% for each composition. Crushed granite aggregate from Martin Marietta, …