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Polarized Light Reflectometer, R. M.A. Azzam Sep 1994

Polarized Light Reflectometer, R. M.A. Azzam

Electrical Engineering Faculty Publications

The modulated reflected and nonreflected light fluxes, measured as the azimuth of incident linearly polarized light is varied, yield the absolute reflectances Rp, and Rs, of a dielectric or semiconductor surface. Application to a reflective Si detector determines the refractive index and thickness of a SiO2 film on the detector surface.

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