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Polarized Light Reflectometer, R. M.A. Azzam
Polarized Light Reflectometer, R. M.A. Azzam
Electrical Engineering Faculty Publications
The modulated reflected and nonreflected light fluxes, measured as the azimuth of incident linearly polarized light is varied, yield the absolute reflectances Rp, and Rs, of a dielectric or semiconductor surface. Application to a reflective Si detector determines the refractive index and thickness of a SiO2 film on the detector surface.