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University of Central Florida

Thin films

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Full-Text Articles in Engineering

Investigation On Electrical Properties Of Rf Sputtered Deposited Bcn Thin Films, Adithya Prakash Jan 2013

Investigation On Electrical Properties Of Rf Sputtered Deposited Bcn Thin Films, Adithya Prakash

Electronic Theses and Dissertations

The ever increasing advancements in semiconductor technology and continuous scaling of CMOS devices mandate the need for new dielectric materials with low-k values. The interconnect delay can be reduced not only by the resistance of the conductor but also by decreasing the capacitance of dielectric layer. Also cross-talk is a major issue faced by semiconductor industry due to high value of k of the inter-dielectric layer (IDL) in a multilevel wiring scheme in Si ultra large scale integrated circuit (ULSI) devices. In order to reduce the time delay, it is necessary to introduce a wiring metal with low resistivity and …


Investigation Of Reactively Sputtered Boron Carbon Nitride Thin Films, Vinit O. Todi Jan 2011

Investigation Of Reactively Sputtered Boron Carbon Nitride Thin Films, Vinit O. Todi

Electronic Theses and Dissertations

Research efforts have been focused in the development of hard and wear resistant coatings over the last few decades. These protective coatings find applications in the industry such as cutting tools, automobile and machine part etc. Various ceramic thin films like TiN, TiAlN, TiC, SiC and diamond-like carbon (DLC) are examples of the films used in above applications. However, increasing technological and industrial demands request thin films with more complicated and advanced properties. For this purpose, B-C-N ternary system which is based on carbon, boron and nitrogen which exhibit exceptional properties and attract much attention from mechanical, optical and electronic …


Optimization Of Process Parameters For Reduced Thickness Cigses Thin Film Solar Cells, Shirish A. Pethe Jan 2010

Optimization Of Process Parameters For Reduced Thickness Cigses Thin Film Solar Cells, Shirish A. Pethe

Electronic Theses and Dissertations

With the advent of the 21st century, one of the serious problems facing mankind is harmful effects of global warming. Add to that the ever increasing cost of fuel and the importance of development of clean energy resources as alternative to fossil fuel has becomes one of the prime and pressing challenges for modern science and technology in the 21st century. Recent studies have shown that energy related sources account for 50% of the total emission of carbon dioxide in the atmosphere. All research activities are focused on developing various technologies that are capable of converting sunlight into electricity with …