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Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam

Electronic Theses and Dissertations

Advancements in microscale actuating technologies has substantially expanded the possibilities of interacting with the surrounding environment. Microstructures that deflect in response to mechanical forces are one of the largest application areas of microelectromechanical systems (MEMS). MEMS devices, functioning as sensors, actuators, and support structures, find applications in inertial sensors, pressure sensors, chemical sensors, and robotics, among others. Driven by the critical role of catalytic membrane reactors, this dissertation aims to evaluate enzyme activity on polymeric membranes and explore how fabrication methods from the field of Electrical and Computer Engineering (ECE) can incorporate sensing and actuation into these porous surfaces. Toward …

Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang

Electronic Theses and Dissertations

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large …

Planar Element Alignment System, Benjamin E. Lavigna, Benny F. Cruz, Samuel Gierhan, Jacob Q. Henriksen

Mechanical Engineering

Precise alignment to the micron level is a necessity for microfluidic/micromechanical devices to function as designed. Because of this, a micro-alignment device was commissioned by Professor Hans Mayer on behalf of the Cal Poly Microfluidics Laboratory. Prototype creation was bounded by a set of requirements including, ability to align PDMS & Silicon wafer halves to ± 10 microns, total process speed of three minutes, and total budget of $3000. Some major design hurdles included an ability to verify alignment, possible non-planar alignment pieces, and an inability to contact any point on the face of the alignment pieces after bonding treatment. …

Nonlinear Dynamics Of A Class Of Ring-Based Angular Rate Sensing And Energy Harvesting Systems, Ibrahim F Abdelhamid Gebrel

Electronic Thesis and Dissertation Repository

This research is classified into two broad sections: ring-based MEMS (Micro-electro Mechanical Systems) and macro gyroscopes and novel bi-stable/monostable nonlinear energy harvesting systems. In both cases, models and solution methods are based on ring structural dynamics considering comprehensive nonlinear formulations. The investigation of nonlinear and linear dynamic response behavior of MEMS and macro ring gyroscopes forms the basis of the first study. This class of MEMS/macro ring-based vibratory gyroscopes requires oscillatory nonlinear electrostatic/electromagnetic excitation forces for their operation. The partial differential equations that govern the ring dynamics are reduced to a set of coupled nonlinear ordinary differential equations by assuming …

Feasibility Study Of Radio Frequency Microelectromechanical Filters For Space Operation, Karanvir Singh

Theses and Dissertations

Piezoelectric contour mode resonator technology has the unique advantage of combining low motional resistance with the ability to define multiple frequencies on the same substrate. Contour mode resonators can be mechanically coupled together to form robust band-pass filters for the next generation of GPS satellites with extreme size reduction compared to electrically coupled filters. Piezoelectric zinc oxide (ZnO) contour mode resonators have the potential for monolithic integration with current ZnO transistor further reducing size, power consumption, and cost of filter modules. Barium strontium titanate (BST) contour mode resonators have incredible frequency tunability due to the fundamental nature of the thin …

Development Of Novel Compound Controllers To Reduce Chattering Of Sliding Mode Control, Mehran Rahmani

Theses and Dissertations

The robotics and dynamic systems constantly encountered with disturbances such as micro electro mechanical systems (MEMS) gyroscope under disturbances result in mechanical coupling terms between two axes, friction forces in exoskeleton robot joints, and unmodelled dynamics of robot manipulator. Sliding mode control (SMC) is a robust controller. The main drawback of the sliding mode controller is that it produces high-frequency control signals, which leads to chattering. The research objective is to reduce chattering, improve robustness, and increase trajectory tracking of SMC. In this research, we developed controllers for three different dynamic systems: (i) MEMS, (ii) an Exoskeleton type robot, and …

Development Of Micro-Scale High Aspect Ratio Patterned Features With Electroless Nickel Plating, Lorli Smith

Theses and Dissertations--Mechanical Engineering

This thesis describes a novel method designed to pattern high aspect ratio metallic microscale features using a modified photolithography and electroless nickel plating process. This method utilizes modified photolithography techniques to create a polymer mold that is used to control the location of metal deposition on substrate during electroless nickel plating. In order to generate high aspect ratio mold features, a multiple spin-step process was developed to deposit thick layers of SU-8 photoresist, and inclined lithography was also used to generate tapered sidewalls that could help aid mold removal after plating. Results from electroplating experiments were evaluated using a Zygo …

Advanced Techniques For Carbon Nanotube Templated Microfabrication, Jason Matthew Lund

Theses and Dissertations

Carbon nanotube templated microfabrication (CNT-M) is a term describing a grouping of processes where carbon nanotubes (CNTs) serve a structural role in the fabrication of a material or device. In its basic form, CNT-M is comprised of two steps: produce a template made from carbon nanotubes and infiltrate the porous template with an additional material. Vertically aligned carbon nanotube (VACNT) templates can be grown to heights ranging from microns to millimeters and lithographically patterned to a desired form. Deposition of an existing thin film material onto a CNT template will coat all template surfaces and can produce a near solid …

Secondary Resonances Of Electrostatically Actuated Mems Cantilevers, Christopher I. Reyes

Theses and Dissertations

In this work the behavior of micro-electromechanical (MEMS) cantilever resonators is investigated. The cantilever resonators are electrostatically actuated with hard AC voltage resulting in nine distinct resonances cases including super and subharmonic resonances. The amplitude frequency and amplitude voltage bifurcation diagrams are obtained for each of the nine resonance cases. Reduced order models (ROMs) are developed to include one and two modes of vibration. Three different methods are used to solve the ROMs namely 1) the method of multiple scales (MMS), which is a perturbation method used for one mode of vibration, 2) the homotopy analysis method (HAM), which is …

Development Of A Counter-Flow Thermal Gradient Microfluidic Device, Shayan Davani

Doctoral Dissertations

This work presents a novel counter-flow design for thermal stabilization of microfluidic thermal reactors. In these reactors, precise control of temperature of the liquid sample is achieved by moving the liquid sample through the thermal zones established ideally through the conduction in the solid material of the device. The goal here is to establish a linear thermal distribution when there is no flow and to minimize the temperature change at flow condition. External convection as well as internal flowinduced effects influence the prescribed thermal distribution. The counter-flow thermal gradient device developed in this study is capable of both stabilizing the …

Bouncing Dynamics Of A Class Of Mem/Nem Switching Systems, Mohamed Bognash

Electronic Thesis and Dissertation Repository

The aim of the present research is to understand the bouncing dynamic behavior of NEM/MEM switches in order to improve the switch performance and reliability. It is well known that the bouncing can dramatically degrade the switch performance and life; hence, in the present study, bouncing dynamics of a cantilever-based NME/MEM switch has been studied in detail. To this end, a model of a MEM switch that incorporates electrostatic force, squeeze film air damping force as well as asperity-based contact force has been proposed for an electrostatically actuated switch. An actuation force due to piezoelectric effects is further included in …

Development Of A Sensing System For Underground Optic Fiber Cable Conduit Mapping, Sherif Bakr

All Graduate Theses, Dissertations, and Other Capstone Projects

The motivation of this research is to obtain an accurate three-dimensional (3D) layout of an underground conduit, which may be beneficial to optic fiber cable installers and engineers. A newly designed algorithm for 3D position tracking with the help of an inertial sensor and an encoder has been developed. Two types of representations (Euler angle and Quaternion) for orientation and rotation are also introduced, followed by several data pre-processing procedures. A sensing fusion method is utilized to overcome the accumulated errors introduced by the sensor drifting. Considering the application of 3D underground duct mapping in this research, a sensing system …

Development Of Microdialysis Probes In Series Approach Toward Eliminating Microdialysis Sampling Calibration: Miniaturization Into A Pdms Microfluidic Device, Randy Espinal Cabrera

Graduate Theses and Dissertations

A new microdialysis sampling method and microfluidic device were developed in vitro. The method consisted of using up to four microdialysis sampling probes connected in series to evaluate the relative recovery (RR) of different model solutes methyl orange, fluorescein isothiocyanate (FITC)-dextran average mol. wt. 4,000 (FITC-4), FITC-10, FITC-20, and FITC-40. Different flow rates (0.8, 1.0, and 1.5 µL/min) were used to compare experimentally observed relative recoveries with theoretical estimations. With increasing the number of probes in series, the relative recovery increases and ~100% (99.7% ± 0.9%) relative recovery for methyl orange was obtained. For larger molecules such as fluorescein isothiocyanate …

Piezoelectric Bistable Buckled Beam Energy Harvester., Brian Edward Allgeier

Electronic Theses and Dissertations

A novel energy harvesting device design is presented to be created via microfabrication techniques. Such devices have countless applications for powering low-current electrical devices, especially wireless sensors or transmitters. This micro-electromechanical system (MEMS) design utilizes the piezoelectric response of a bistable buckled beam to gather electrical energy via ambient vibrations. While many traditional piezoelectric energy harvesters (PEH) consist of simple cantilever beam geometries, this nonlinear design utilizes inertial effects of torsional lever arms to actuate a central buckled beam to snap between its two stable states; such an abrupt strain on the piezoelectric beam potentially produces a significantly increased electrical …

Design, Modeling, Fabrication, And Testing Of A Multistage Micro Gas Compressor With Piezoelectric Unimorph Diaphragm And Passive Microvalves For Microcooling Applications, Shawn Thanhson Le

Doctoral Dissertations

This dissertation investigates the development of a multistage micro gas compressor utilizing multiple pump stages cascaded in series to increase the pressure rise with passive microvalves and piezoelectric unimorph diaphragms. This research was conducted through modeling, simulation, design, and fabrication of the microcompressor and its components. A single-stage and a two-stage microcompressor were developed to demonstrate and compare the performance and effectiveness of using a cascaded multistage design.

Steady fluid flow through static microvalves structure was studied to gain insight on its gas flow dynamics and characteristics. Transient analysis combined with the structure's interaction was investigated with an analytical model …

Selective Resistive Sintering: A Novel Additive Manufacturing Process, Austin Bryan Van Horn

Graduate Theses and Dissertations

Selective laser sintering (SLS) is one of the most popular 3D printing methods that uses a laser to pattern energy and selectively sinter powder particles to build 3D geometries. However, this printing method is plagued by slow printing speeds, high power consumption, difficulty to scale, and high overhead expense. In this research, a new 3D printing method is proposed to overcome these limitations of SLS. Instead of using a laser to pattern energy, this new method, termed selective resistive sintering (SRS), uses an array of microheaters to pattern heat for selectively sintering materials. Using microheaters offers significant power savings, significantly …

Analytical Modeling Of A Novel Microdisk Resonator For Liquid-Phase Sensing: An All-Shear Interaction Device (Asid), Mohamad Sadegh Sotoudegan

Dissertations (1934 -)

Extensive research on micro/nanomechanical resonators has been performed recently due to their potential to serve as ultra-sensitive devices in chemical/biosensing. These applications often necessitate liquid-phase sensing, introducing significant fluid-induced inertia and energy dissipation that reduces the resonator’s performance. To minimize the detrimental fluid effects on such devices, a novel microdisk resonator supported by two tangentially-oriented, axially-driven “legs” is investigated analytically and effects of the system parameters on the resonator/sensor performance are explored. Since the device surface vibrates primarily parallel to the fluid-structure interface, it is referred to here as an “all-shear interaction device,” or ASID. Analytical modeling of the ASID …

Theory, Fabrication, And Experimentation Of Phononic Crystals In Mems At Micro/Nano Scale: Engineering Of Thermal And Rf Phonons To Applications In Thermoelectrics And Microresonators, Seyedhamidreza Alaie

Mechanical Engineering ETDs

Phononic Crystals (PnCs) are novel materials comprised of a periodic structure of inclusions in a matrix. This periodic arrangement creates phononic bandgaps, and modifies phononic bandstructures of a material. Such a property offers promising applications at the micro and nano scales to engineer acoustic filters, high Q-factor resonators, and thermoelectric properties of materials. Studying PnCs at the micro/nano scale requires specific characterization techniques, which rely on Micro Electro Mechanical Structures (MEMS). This work focuses on the study, and characterization of PnCs using MEMS in view of their prospective applications in thermoelectric materials, microresonators and acoustic filters, and also the prospective …

Design, Fabrication, And Testing Of A 3d Printer Based Microfluidic System, Carlton A. Mcmullen

Graduate Theses and Dissertations

A pneumatically actuated PDMS based microfluidic devices were designed and fabricated by soft-lithography. Two types of molds were fabricated out of different material for this experiment. The first mold, (device 1), was fabricated from a sheet of Polymethyl methacrylate (PMMA) material, similar to Plexiglas. The device features were micro-engraved onto the face of the material. The second mold, (device 2), was fabricated from the use of fused deposition modeling (FDM) 3D printing. The pumping efficiency of the PDMS devices was analyzed through the characterization of the micro-pumps flowrate with respect to the pumps driving pressure and the actuation frequency. Tested …

Stochastic Stability And Uncertainty Quantification Of Ring-Based Vibratory Gyroscopes, Soroush Arghavan

Electronic Thesis and Dissertation Repository

Effect of stochastic fluctuations in angular velocity on the stability of two DOF ring-type MEMS gyroscopes is investigated. The governing Stochastic Differential Equations are discretized using the higher-order Milstein scheme in order to numerically predict the system response assuming the fluctuations to be white noise. Simulations via Euler scheme as well as a measure of Largest Lyapunov Exponents are employed for validation purposes due to lack of similar analytical or experimental data. The stability investigation predicts that the threshold fluctuation intensity increases nonlinearly with damping ratio. Under typical gyroscope operating conditions, nominal input angular velocity magnitude and mass mismatch appear …

Fabrication Of Magnetic Two-Dimensional And Three-Dimensional Microstructures For Microfluidics And Microrobotics Applications, Hui Li

Theses and Dissertations--Mechanical Engineering

Micro-electro-mechanical systems (MEMS) technology has had an increasing impact on industry and our society. A wide range of MEMS devices are used in every aspects of our life, from microaccelerators and microgyroscopes to microscale drug-delivery systems. The increasing complexity of microsystems demands diverse microfabrication methods and actuation strategies to realize. Currently, it is challenging for existing microfabrication methods—particularly 3D microfabrication methods—to integrate multiple materials into the same component. This is a particular challenge for some applications, such as microrobotics and microfluidics, where integration of magnetically-responsive materials would be beneficial, because it enables contact-free actuation. In addition, most existing microfabrication methods …

Modeling And Simulation Of Surface Profile Forming Process Of Microlenses And Their Application In Optical Interconnection Devices, Zhengyu Miao

LSU Doctoral Dissertations

Free space micro-optical systems require to integrate microlens array, micromirrors, optical waveguides, beam splitter, etc. on a single substrate. Out-of-plane microlens array fabricated by direct lithography provides pre-alignment during mask fabrication stage and has the advantage of mass manufacturing at low cost. However, this technology requires precise control of the surface profile of microlenses, which is a major technical challenge. The quality control of the surface profile of microlenses limits their applications. In this dissertation, the surface forming process of the out-of-plane microlenses in UV-lithography fabrication was modeled and simulated using a simplified cellular automata model. The microlens array was …

Toward Sophisticated Controls Of Two-Phase Transport At Micro/Nano-Scale, Fanghao Yang

Theses and Dissertations

Through the use of latent heat evaporating, flow boiling in microchannels offers new opportunities to enable high efficient heat and mass transport for a wide range of emerging applications such as high power electric/electronic/optical cooling, compact heat exchangers and reactors. However, flow boiling in microchannels is hampered by several severe constraints such as bubble confinement (e.g., slug flow), viscosity and surface tension force-dominated flows, which result in unpredictable flow pattern transitions and tend to induce severe flow boiling instabilities (i.e. low-frequency and large magnitude flows) and suppress evaporation and convection.

In this dissertation, three novel micro/nanoscale thermo-fluidic control methodologies were …

Development Of Mems-Based Corrosion Sensor, Feng Pan

Graduate Theses and Dissertations

This research is to develop a MEMS-based corrosion sensor, which is used for monitoring uniform, galvanic corrosion occurring in infrastructures such as buildings, bridges. The corrosion sensor is made up of the composite of micro/nano metal particles with elastomers. The mechanism of corrosion sensor is based on the mass transport of corrosive species through the sensor matrix. When the metal particles in the matrix corrode, the electrical resistivity of the material increases due to increasing particle resistances or reduction of conducting pathways. The corrosion rate can be monitored by detecting the resistivity change in sensing elements. The life span of …

Design And Testing Of A Biological Microelectromechanical System For The Injection Of Thousands Of Cells Simultaneously, Gregory Herlin Teichert

Theses and Dissertations

The ability to inject DNA and other foreign particles into cells, both germ cells (e.g. to produce transgenic animals) and somatic cells (e.g. for gene therapy), is a powerful tool in genetic research. Nanoinjection is a method of DNA delivery that combines mechanical and electrical methods. It has proven to have higher cell viability than traditional microinjection, resulting in higher integration per injected embryo. The nanoinjection process can be performed on thousands of cells simultaneously using an array of microneedles that is inserted into a monolayer of cells. This thesis describes the needle array design requirements and the fabrication process …

Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo

Master's Theses

ABSTRACT

Fabrication and Characterization of Torsional Micro-Hinge Structures

Mike Marrujo

There are many electronic devices that operate on the micrometer-scale such as Digital Micro-Mirror Devices (DMD). Micro actuators are a common type of DMD that employ a diaphragm supported by torsional hinges, which deform during actuation and are critical for the devices to have high stability and reliability. The stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. Electrostatically driven micro actuators observe to have a fully recoverable non-linear viscoelastic response. The device consists of a micro-hinge which is suspended by two …

Mechanical Properties And Mems Applications Of Carbon-Infiltrated Carbon Nanotube Forests, Walter C. Fazio

Theses and Dissertations

This work explores the use of carbon-infiltrated carbon nanotube (CI-CNT) forests as a material for fabricating compliant MEMS devices. The impacts of iron catalyst layer thickness and carbon infiltration time are examined. An iron layer of 7nm or 10nm with an infiltration time of 30 minutes produces CI-CNT best suited for compliant applications. Average maximum strains of 2% and 2.48% were observed for these parameters. The corresponding elastic moduli were 5.4 GPa and 4.1 GPa, respectively. A direct comparison of similar geometry suggested CI-CNT is 80% more flexible than single-crystal silicon. A torsional testing procedure provided an initial shear modulus …

Low Loss Vhf And Uhf Filters For Wireless Communications Based On Piezoelectrically-Transduced Micromechanical Resonators, Julio Mario Dewdney

USF Tampa Graduate Theses and Dissertations

For the past decade, a great deal of research has been focused towards developing a viable on-chip solution to replace the current state-of-the-art VHF and UHF filters based on SAW and FBAR technologies. Although filters based on SAW and FBAR devices are capable of fulfilling the basic requirements needed for IF and RF bandpass filtering and reference signal generation, an alternative solution that can enable the next generation of multi-frequency and multi-mode transceivers while enabling size and price reduction by allowing the manufacturing of single-chip monolithic RF transceivers is highly desired. In response to these new needs, piezoelectrically-transduced micromechanical filters …

Pdms Based Waveguides For Microfluidics And Eocb, Weiping Qiu

LSU Master's Theses

Due to the low cost, fast and ease of molding, PDMS has become one of the most popular materials for microfluidics devices, bioMEMS applications. Meanwhile, the integration of different functional components on to one single chip (or Lab on a Chip) is the dream for many scientists and engineers in the related area. In addition to the necessary mechanical components for accommodating the reactions, such as pumps, valves, mixers and so on, optical components such as waveguides, lens, interferers are all desired to be lumped into such a system.

The waveguide for such a system requires the material to have …

Devices And Methods For Electro-Physical Transport Of Dna Across Cell Membranes, Quentin Theodore Aten

Theses and Dissertations

A novel method for charged macromolecule delivery, called nanoinjection, has been developed at Brigham Young University. Nanoinjection combines micro-fabrication technology, mechanism design, and nano-scale electrical phenomenon to transport exogenous DNA across cell membranes on a nano-featured lance. DNA is electrically accumulated on the lance, precision movements of microelectromechanical systems (MEMS) physically insert the lance into cell, and DNA is electrically released from the lance into the cell. Penetration into the cell is achieved through a two-phase, self-reconfiguring metamorphic mechanism. The surface-micromachined, metamorphic nanoinjector mechanism elevates the lance above the fabrication substrate, then translates in-plane at a constant height as the …