Physical Sciences and Mathematics Commons^™

Optimization Of Chemical Vapor Deposition Grown Graphene, Andrew Tan

Senior Theses

Graphene can be used as the active film in a gas sensor. To provide the best possible electrical properties, it is important that graphene films be single-layered and single-crystalline. A low vacuum chemical vapor deposition (CVD) chamber was constructed to grow graphene with these properties. The effect of growth parameters, such as annealing times and methane partial pressure, on the quality of graphene was investigated. Raman spectra of graphene were used to quantify the characteristics of the synthesized graphene. Graphene synthesized through CVD has two major peaks, the G (~1570cm^-1) and the 2D peak (~2700 cm^-1). …