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Full-Text Articles in Physical Sciences and Mathematics
Analysis Of Adsorbed Contaminants Of Caf/Sub 2/ Surfaces By Infrared Laser Induced Desorption, Jinmei Fu, Yamini Surapaneni, Susan D. Allen
Analysis Of Adsorbed Contaminants Of Caf/Sub 2/ Surfaces By Infrared Laser Induced Desorption, Jinmei Fu, Yamini Surapaneni, Susan D. Allen
Mechanical Engineering - Daytona Beach
157 nm photolithography technologies are currently under development and have been accepted as the leading candidate for fabrication of the next generation semiconductor devices after 193 nm. At this and shorter wavelengths, molecular contamination of surfaces becomes a serious problem as almost all molecules absorb at 157 nm and below. The light transmitted by a photolithographic tool can be significantly decreased by the presence of a few monolayers adsorbed on its many optical surfaces. We have developed a laser induced desorption, electron impact ionization, time-of-flight mass spectrometer (LID TOFMS) to study contaminants on 157nm and other ultraviolet optics, e.g., polished …
New Adsorbents From Ti(Opr^{N})_{4} By The Sol-Gel Process: Synthesis, Characterization And Application For Removing Some Heavy Metal Ions From Aqueous Solution, Funda Sayilkan, Hi̇kmet Sayilkan, Sema Erdemoğlu, Şadi̇ye Şener, Murat Akarsu
New Adsorbents From Ti(Opr^{N})_{4} By The Sol-Gel Process: Synthesis, Characterization And Application For Removing Some Heavy Metal Ions From Aqueous Solution, Funda Sayilkan, Hi̇kmet Sayilkan, Sema Erdemoğlu, Şadi̇ye Şener, Murat Akarsu
Turkish Journal of Chemistry
New adsorbents were synthesized by the sol-gel process from the product of a hydrolysis reaction and its coated form of titanium(IV)-n-propoxide for removing some heavy metal ions from aqueous solution. Titanium(IV)-n-propoxide was uncatalyst hydrolyzed with different amounts of water at room temperature and was found to react in a 1:1.6 ratio (mole of Ti:mole of H_{2}O). It was found that the condensation following the hydrolysis reaction was alcohol condensation. The hydrolysis-condensation product was characterized in detail by GC, Karl-Fischer coulometric titrator, NIR-spectroscopy, FT-IR spectroscopy, TG-DTA and elemental analysis. The hydrolysis-condensation product of titanium(IV)-n-propoxide was calcinated at 900 °C after drying …