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Effect Of Development Time On Polymer Phase Separation In A Pmma Resist, Mohammad Naeem Khalid, Shazia Yasin, Mohammad Riaz Khan
Effect Of Development Time On Polymer Phase Separation In A Pmma Resist, Mohammad Naeem Khalid, Shazia Yasin, Mohammad Riaz Khan
Turkish Journal of Physics
Developer composition type and development technique are known to influence surface and edge roughness in polymethylemethacrylate (PMMA); and it is during development, we believe, that the result is most influenced by the phase separation into polymer-rich and polymer-poor regions. This polymer phase separation is more prominent in a weaker developer and low temperature. In this paper, we investigate the effect of development time on the extent of polymer phase separation in an exposed PMMA developed in a standard developer i.e. 1:3 MIBK:IPA at 20 °C and rinsed in pure IPA for 30 sec. The polymer phase separation is found to …