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Thermochemical And Green Luminescence Analysis Of Zinc Oxide Thin Films Grown On Sapphire By Chemical Vapor Deposition, Abdelkader Djelloul, R. A. Rabadanov

Turkish Journal of Physics

This study has been carried out to detail an integral thermochemical analysis of the principal reaction in the production of zinc oxide (ZnO) thin films, including developing an analytical form of the equilibrium constant. Zinc oxide thin films prepared by chemical vapor deposition have been studied in terms of deposition time and substrate temperature. The growth of the single-crystal films present two regimes depending on the substrate temperature, with increasing constant growth rates at lower, and higher, temperature ranges, respectively. Growth rates above 6 \mu m \cdot min^{-1} can be achieved at T_s = 880 K. The variation of the …