Physical Sciences and Mathematics Commons^™

A Diamond Thin Film Flow Sensor, Sacharia Albin, John C. Hagwood, John B. Cooper, David L. Gray, Scott D. Martinson, Michael A. Scott

Electrical & Computer Engineering Faculty Publications

We present the results of theoretical modeling and experimental testing of a diamond thin film sensor for flow studies. It is shown that the high thermal conductivity of a diamond film can enhance the frequency response of the flow sensor. One-dimensional heat diffusion equation was solved using the finite difference method for determining the frequency response. Two different sensor structures were analyzed: a Ni film on a quartz substrate (Ni/Q) and an intermediate layer of diamond film between the Ni film and quartz substrate (Ni/D/Q). The theoretical model predicts a frequency response for the Ni/D/Q sensor higher than that of …