Physical Sciences and Mathematics Commons^™

Understanding Dc-Bias Sputtered Thorium Oxide Thin Films Useful In Euv Optics, William R. Evans, Sarah C. Barton, Michael Clemens, David D. Allred

Faculty Publications

We use spectroscopic ellipsometry to determine the optical constants of seven thin-film ThO2 samples deposited by radio-frequency sputtering, thickness ranging between 24 and 578 nm, for the spectral range of 1.2 to 6.5. We used a hollow-cathode light source and vacuum monochromator to measure constants at 10.2 eV. None of the deposition parameters studied including DC-bias voltages successfully increased the n of (that is, densify) thoria films. The value of n at 3.0 eV is 1.86 ± 0.04. We find compelling evidence to conclude that the direct bad gap is at ~5.9 eV, clarifying the results of others, some of …