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Measurements Of Electron Energy Distribution In An Argon Positive Column, Chin Oi Hoong
Measurements Of Electron Energy Distribution In An Argon Positive Column, Chin Oi Hoong
Chin Oi Hoong
The argon positive column plasma of a cold cathode glow discharge is studied using a pulsed single Langmuir Probe technique. It is observed thatthe energy distribution of the electrons in the posotive column is non-maxwellian at a gas pressure of 0.5 mbar. An increase in the gas pressure seems to make the distribution more Maxwellian.