Physical Sciences and Mathematics Commons^™

Electron Energy Dependent Charging Effects Of Multilayered Dielectric Materials, Gregory Wilson, John R. Dennison, Amberly Evans, Justin Dekany

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Measurements of the charge distribution in electron-bombarded, thin-film, multilayer dielectric samples showed that charging of multilayered materials evolves with time and is highly dependent on incident energy; this is driven by electron penetration depth, electron emission and material conductivity. Based on the net surface potential’s dependence on beam current, electron range, electron emission and conductivity, measurements of the surface potential, displacement current and beam energy allow the charge distribution to be inferred. To take these measurements, a thin-film disordered SiO2 structure with a conductive middle layer was charged using 200 eV and 5 keV electron beams with regular 15 s …