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Preparation And Optimization Of High Quality Tin Films, Özlem Duyar, Cengi̇z Koçum, H. Zafer Durusoy
Preparation And Optimization Of High Quality Tin Films, Özlem Duyar, Cengi̇z Koçum, H. Zafer Durusoy
Turkish Journal of Physics
TiN thin films have been deposited by DC reactive magnetron sputtering method on glass substrates. The effects of the substrate temperature and the substrate bias voltage on the structural, optical and electrical properties of the films were studied by using XRD, STM, optical transmission and resistivity measurements. The bias voltage was varied in the 0 to 200 V range for two substrate temperatures, 100 °C and 300 °C. The results showed that the substrate bias voltage influenced the stoichiometry and structure of the films. The smoothest and least porous TiN films were prepared at about 160 V substrate bias voltage …