Physical Sciences and Mathematics Commons^™

Development Of A Laser-Spark Multicharged Ion System – Application In Shallow Implantation Of Sic By Boron And Barium, Md. Haider Ali Shaim

Electrical & Computer Engineering Theses & Dissertations

A novel multicharged ion source, using laser ablation induced plasma coupled with spark discharge, has been investigated in this work. The designed and demonstrated ion source is cost-effective, compact and versatile. Experiments are described with the intention of demonstrating the practicability of ion implantation via laser ion source.

Multicharged aluminum ions are generated by a ns Q-switched Nd:YAG laser pulse ablation of an aluminum target in an ultrahigh vacuum. The experiments are conducted using laser pulse energies of 45–90 mJ focused on the Al target surface by a lens with an 80-cm focal length to 0.0024 cm² spot area …