Physical Sciences and Mathematics Commons^™

Real Time Spectroscopic Ellipsometry Analysis Of First Stage Cuin1-Xgaxse2 Growth: Indium-Gallium Selenide Co-Evaporation, Puja Pradhan, Puruswottam Aryal, Dinesh Attygalle, Abdel-Rahman Ibdah, Prakash Koirala, Jian Li, Khagendra P. Bhandari, Geethika K. Liyanage, Randy J. Ellingson, Michael J. Heben, Sylvain Marsillac, Robert W. Collins, Nikolas J. Podraza

Electrical & Computer Engineering Faculty Publications

Real time spectroscopic ellipsometry (RTSE) has been applied for in-situ monitoring of the first stage of copper indium-gallium diselenide (CIGS) thin film deposition by the three-stage co-evaporation process used for fabrication of high efficiency thin film photovoltaic (PV) devices. The first stage entails the growth of indium-gallium selenide (In_1-xGa_x)₂Se₃ (IGS) on a substrate of Mo-coated soda lime glass maintained at a temperature of 400 °C. This is a critical stage of CIGS deposition because a large fraction of the final film thickness is deposited, and as a result precise compositional control is desired in order to …