Physical Sciences and Mathematics Commons^™

Y2O3 Optical Constants Between 5 Nm And 50 Nm, Joseph B. Muhlestein, Benjamin D. Smith, Margaret Miles, Stephanie M. Thomas, Anthony Willey, David D. Allred, R. Steven Turley

Faculty Publications

We report optical constants of e-beam evaporated yttrium oxide Y₂O₃ thin films as determined from angle-dependent reflectance measurements at wavelengths from 5 to 50 nm. Samples were measured using synchrotron radiation at the Advanced Light Source. The experimental reflectance data were fit to obtain values for the index of refraction and thin film roughness. We compare our computed constants with those of previous researchers and those computed using the independent atom approximation from the CXRO website. We found that the index of refraction near 36 nm is much lower than previous data from Tomiki as reported by …