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Physical Sciences and Mathematics Commons™
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Full-Text Articles in Physical Sciences and Mathematics
Determining Thin Film Roughness With Euv Reflection, Cody Petrie, Steven Turley
Determining Thin Film Roughness With Euv Reflection, Cody Petrie, Steven Turley
Journal of Undergraduate Research
Introduction: Reflection of extreme ultraviolet (EUV) light is made difficult by a number of factors. First, most materials have a large, imaginary part of the index of refraction for EUV light, causing absorption. As a result, our experiment is done under vacuum. Second, since the wavelength of EUV light (1-100 nm) is smaller than visible light, it is scattered more strongly than visible light. To overcome this obstacle we need to make our reflecting surfaces smoother. To be able to do this we need a good probe for surface roughness on the scale of EUV wavelengths. Currently the best method …
Determining Surface Roughness Using Extreme Ultraviolet Light, Joshua Marx, Steve Turley
Determining Surface Roughness Using Extreme Ultraviolet Light, Joshua Marx, Steve Turley
Journal of Undergraduate Research
Extreme ultraviolet (XUV) light is light with wavelengths between one and 60 nanometers. The shorter wavelengths of light in this range are on the same order of magnitude as atomic dimensions. Currently, XUV optics have many uses and even more potential applications in a variety of fields, such as photolithography, plasma diagnostics, and astrophysics.