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Thermal Oxidation Of Silicon In A Home-Made Furnace System, Joshua Koskan
Thermal Oxidation Of Silicon In A Home-Made Furnace System, Joshua Koskan
Physics Capstone Projects
I approached Dr. Shen with a desire for a project in understanding how to manage and expand the capabilities of a laboratory. After some discussion, my senior project was to complete a gas and water chiller system to an existing furnace for chemical vapor deposition. It should be able to handle temperatures up to 1100 ºC, hold a vacuum to mTorr, be easy to move samples in and out of the furnace, and cost effective.