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Harmonic Detection Of Resonance In Micro- And Nano- Cantilevers, Jay Gaillard

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Over the past decade there has been an explosion in the study of cantilevered beams on the micron and submicron dimension. The applications and research that involve these structures include state-of-the-art electronic components, sensors, and more recently, studies aimed at elucidating the mechanical properties of cantilevered carbon nanotubes and semiconducting nanowires. In nanoelectro-mechanical systems (NEMS), it is desirable to develop a capacitive readout method involving only two electrodes that are fully compliant with standard CMOS technology. However, the main drawback with this method is the ability to detect resonance in the presence of parasitic capacitance, which is due to the …