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The Fabrication And Characterization Of Granular Aluminium/Palladium Bilayer Microbolometers, Thomas E. Wilson
The Fabrication And Characterization Of Granular Aluminium/Palladium Bilayer Microbolometers, Thomas E. Wilson
Thomas E. Wilson
Superconducting granular aluminium/palladium bilayer microbolometers with subnanosecond response can be easily fabricated using an all lift-off process with image-reversal lithography. The palladium capping layer allows for convenient and reproducible Ohmic contacts to be made to the device. We report their fabrication, resistance–current calibration, responsivity and response time. Finally, a deconvolution algorithm is used to improve the time resolution to approximately 1 ns while obtaining the incident photon and phonon fluxes in both direct photoexcitation and phonon heat pulse experiments.