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A. Dark conductivity; B. Photoconductivity; Rf power density; D. Activation energy; E.Hydrogenated amorphous silicon.
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Full-Text Articles in Physical Sciences and Mathematics
Effect Of Rf Power On The Electrical Properties Of Glow-Discharge A-Si:H, Hüseyi̇n Tolunay
Effect Of Rf Power On The Electrical Properties Of Glow-Discharge A-Si:H, Hüseyi̇n Tolunay
Turkish Journal of Physics
Hydrogenated amorphous silicon films were prepared in an rf glow-discharge system by decomposing undiluted silane at various rf power densities. Dark conductivity and photoconductivity of the films have been measured in the temperature range 420K-100K at four different photon fluxes. It was observed that both dark conductivity and photoconductivity increase with increasing rf power density.