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- Breast (1)
- Buried Multilayer Phase Defects (1)
- Coherent Scatter (1)
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Articles 1 - 2 of 2
Full-Text Articles in Physical Sciences and Mathematics
Diffraction-Based Techniques For High Contrast X-Ray Imaging, Lubna Naseem Peerzada
Diffraction-Based Techniques For High Contrast X-Ray Imaging, Lubna Naseem Peerzada
Legacy Theses & Dissertations (2009 - 2024)
Two X-ray diffraction based techniques for high contrast were explored to improve contrast in radiology: diffraction enhanced imaging (DEI) and coherent scatter imaging.
Experimental And Simulation Studies Of Printability Of Buried Euv Mask Defects And Study Of Euv Reflectivity Loss Mechanisms Due To Standard Euv Mask Cleaning Processes, Mihirkant Upadhyaya
Experimental And Simulation Studies Of Printability Of Buried Euv Mask Defects And Study Of Euv Reflectivity Loss Mechanisms Due To Standard Euv Mask Cleaning Processes, Mihirkant Upadhyaya
Legacy Theses & Dissertations (2009 - 2024)
There's a big push for development and commercialization of extreme ultraviolet (EUV) lithography for high-volume semiconductor manufacturing of 14 nm half-pitch patterning and beyond. One of the primary concerns for making this a reality has been the ability to achieve defect-free masks. My study is focused on two aspects related to the performance degradation of the EUV masks namely EUV mask cleaning induced reflectivity loss mechanisms, and the buried multilayer phase defects in EUV masks.