Physical Sciences and Mathematics Commons^™

Cylindrical Magnetron Development For Nb₃Sn Deposition Via Magnetron Sputtering, Md. Nizam Sayeed, Hani Elsayed-Ali, C. Côté, M. A. Farzad, A. Sarkissian, G. V. Eremeev, A-M. Valente-Feliciano

Electrical & Computer Engineering Faculty Publications

Due to its better superconducting properties (critical temperature Tc~ 18.3 K, superheating field H_sh~ 400 mT), Nb₃Sn is considered as a potential alternative to niobium (Tc~ 9.25 K, H_sh~ 200 mT) for superconducting radiofrequency (SRF) cavities for particle acceleration. Magnetron sputtering is an effective method to produce superconducting Nb₃Sn films. We deposited superconducting Nb₃Sn films on samples with magnetron sputtering using co-sputtering, sequential sputtering, and sputtering from a stoichiometric target. Nb₃Sn films produced by magnetron sputtering in our previous experiments have achieved DC superconducting critical temperature up to …