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Electrical and Computer Engineering

Electrical & Computer Engineering Theses & Dissertations

Microdischarge

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Full-Text Articles in Physical Sciences and Mathematics

Self-Organization In Cathode Boundary Layer Discharges, Nobuhiko Takano Oct 2007

Self-Organization In Cathode Boundary Layer Discharges, Nobuhiko Takano

Electrical & Computer Engineering Theses & Dissertations

Cathode boundary layer (CBL) discharge, which has been developed as a UV light source, operates in a direct current between a planar cathode and a ring-shape anode that are separated by a dielectric with an opening of the same diameter as the anode. The nonthermal CBL discharges operate in a medium pressure range down to 30 Torr, emitting excimer radiation when operated with noble gases. The radiant excimer emittance at 172 nm in xenon reaches 1.7 W/cm2, and a maximum excimer efficiency of 6 % has been obtained. The high excimer radiant emittance, in addition to low cost …


Microdischarge Arrays, Wenhui Shi Apr 2004

Microdischarge Arrays, Wenhui Shi

Electrical & Computer Engineering Theses & Dissertations

Microhollow cathode discharges (MHCDs) are DC or pulsed gas discharges between two electrodes, separated by a dielectric, and containing a concentric hole. The diameter of the hole, in this hollow cathode configuration, is in the hundred-micrometer range. MHCDs satisfy the two conditions necessary for an efficient excimer radiation sources: (1) high energy electrons which are required to provide a high concentration of excited or ionized rare gas atoms; (2) high pressure operation which favors excimer formation (a three-body process). Flat panel excimer sources require parallel operation of MHCDs. Based on the current-voltage characteristics of MHCD discharges, which have positive slopes …